JPH0728693Y2 - ウェハ保持具 - Google Patents

ウェハ保持具

Info

Publication number
JPH0728693Y2
JPH0728693Y2 JP1988128885U JP12888588U JPH0728693Y2 JP H0728693 Y2 JPH0728693 Y2 JP H0728693Y2 JP 1988128885 U JP1988128885 U JP 1988128885U JP 12888588 U JP12888588 U JP 12888588U JP H0728693 Y2 JPH0728693 Y2 JP H0728693Y2
Authority
JP
Japan
Prior art keywords
wafer
positioning
clamp
clamp plate
pins
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988128885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0250954U (en]
Inventor
博昭 中西
郁夫 小西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1988128885U priority Critical patent/JPH0728693Y2/ja
Publication of JPH0250954U publication Critical patent/JPH0250954U/ja
Application granted granted Critical
Publication of JPH0728693Y2 publication Critical patent/JPH0728693Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988128885U 1988-09-30 1988-09-30 ウェハ保持具 Expired - Lifetime JPH0728693Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988128885U JPH0728693Y2 (ja) 1988-09-30 1988-09-30 ウェハ保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988128885U JPH0728693Y2 (ja) 1988-09-30 1988-09-30 ウェハ保持具

Publications (2)

Publication Number Publication Date
JPH0250954U JPH0250954U (en]) 1990-04-10
JPH0728693Y2 true JPH0728693Y2 (ja) 1995-06-28

Family

ID=31382641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988128885U Expired - Lifetime JPH0728693Y2 (ja) 1988-09-30 1988-09-30 ウェハ保持具

Country Status (1)

Country Link
JP (1) JPH0728693Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4559801B2 (ja) * 2004-09-06 2010-10-13 東京エレクトロン株式会社 ウエハチャック
JP6232247B2 (ja) * 2013-10-17 2017-11-15 株式会社ディスコ 被加工物保持機構

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62103257U (en]) * 1985-12-19 1987-07-01

Also Published As

Publication number Publication date
JPH0250954U (en]) 1990-04-10

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